US 12,291,775 B2
Depositing coatings on and within housings, apparatus, or tools
James M. Price, Houston, TX (US); Michael T. Pelletier, Houston, TX (US); Jian Li, Houston, TX (US); William Joseph Soltmann, Houston, TX (US); Christopher Michael Jones, Houston, TX (US); and Anthony Herman Van Zuilekom, Houston, TX (US)
Assigned to Halliburton Energy Services, Inc., Houston, TX (US)
Filed by Halliburton Energy Services, Inc., Houston, TX (US)
Filed on May 23, 2022, as Appl. No. 17/751,071.
Application 17/751,071 is a division of application No. 16/717,947, filed on Dec. 17, 2019, granted, now 11,371,137.
Claims priority of provisional application 62/819,194, filed on Mar. 15, 2019.
Prior Publication US 2022/0282365 A1, Sep. 8, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/04 (2006.01); C23C 16/02 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/045 (2013.01) [C23C 16/0227 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/45555 (2013.01); H01J 37/32357 (2013.01); H01J 37/32394 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A method of coating an interior surface adjacent an interior volume of a housing, the interior volume having an inlet and an outlet, the method comprising: enclosing all or a portion of the interior volume of the housing to yield an enclosed volume by sealingly engaging a first closure to the inlet of the housing and sealingly engaging a second closure to the outlet of the housing to form the enclosed volume; introducing one or more reactant gases, plasma, or both to the enclosed volume via a delivery line directly coupled to the first closure; and forming one or more coating layers on all or a portion of the interior surface adjacent the enclosed interior volume of the housing via reaction of the reactant gases, optionally in the presence of the plasma,
wherein the reaction comprises a chemical vapor deposition (CVD) reaction, an atomic layer deposition (ALD) reaction, or both, such that the one or more coating layers respectively comprise an ALD layer, a CVD layer, or both, and
wherein the housing comprises a formation fluid sampling tool.