CPC C23C 16/045 (2013.01) [C23C 16/0227 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/45555 (2013.01); H01J 37/32357 (2013.01); H01J 37/32394 (2013.01)] | 27 Claims |
1. A method of coating an interior surface adjacent an interior volume of a housing, the interior volume having an inlet and an outlet, the method comprising: enclosing all or a portion of the interior volume of the housing to yield an enclosed volume by sealingly engaging a first closure to the inlet of the housing and sealingly engaging a second closure to the outlet of the housing to form the enclosed volume; introducing one or more reactant gases, plasma, or both to the enclosed volume via a delivery line directly coupled to the first closure; and forming one or more coating layers on all or a portion of the interior surface adjacent the enclosed interior volume of the housing via reaction of the reactant gases, optionally in the presence of the plasma,
wherein the reaction comprises a chemical vapor deposition (CVD) reaction, an atomic layer deposition (ALD) reaction, or both, such that the one or more coating layers respectively comprise an ALD layer, a CVD layer, or both, and
wherein the housing comprises a formation fluid sampling tool.
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