US 12,291,770 B2
Mask, manufacturing method of mask, and manufacturing method of display panel
Mingxing Liu, Kunshan (CN); Shuaiyan Gan, Kunshan (CN); Weili Li, Kunshan (CN); and Bing Han, Kunshan (CN)
Assigned to KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD, Kunshan (CN)
Filed by KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD, Jiangsu (CN)
Filed on Nov. 4, 2021, as Appl. No. 17/519,006.
Application 17/519,006 is a continuation of application No. PCT/CN2020/104734, filed on Jul. 27, 2020.
Claims priority of application No. 201910989459.1 (CN), filed on Oct. 17, 2019.
Prior Publication US 2022/0056574 A1, Feb. 24, 2022
Int. Cl. C23C 14/04 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01); H10K 71/16 (2023.01); H10K 71/00 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/24 (2013.01); H10K 71/166 (2023.02); H10K 71/00 (2023.02)] 12 Claims
OG exemplary drawing
 
1. A manufacturing method of a mask, comprising:
providing a first substrate, wherein the first substrate comprises a first surface and a second surface that are arranged opposite to each other;
etching the first surface to form a plurality of first grooves;
etching the second surface to form a plurality of third grooves, wherein the plurality of third grooves and the plurality of first grooves are in a one-to-one correspondence, and an opening area of each of the plurality of third grooves is greater than an opening area of each of the plurality of first grooves; on the second surface, a distance between adjacent ones of the plurality of third grooves is greater than a preset distance, wherein the preset distance is greater than zero;
applying a protective layer on an edge area of a side surface of each of the plurality of third grooves closer to the second surface;, wherein on the second surface, an angle between a surface tangent of the edge area of the side surface of each of the plurality of third grooves closer to the second surface and a first direction is less than or equal to 10°, wherein the first direction is a thickness direction of the mask;
etching the plurality of third grooves to form second grooves, wherein a depth of each of the second grooves is greater than a depth of each of the plurality of third grooves, and the second grooves and the plurality of first grooves penetrate the first substrate; and
removing the protective layer.