US 12,290,881 B2
Laser processing method
Hiroshi Morikazu, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Mar. 29, 2023, as Appl. No. 18/192,104.
Claims priority of application No. 2022-063904 (JP), filed on Apr. 7, 2022.
Prior Publication US 2023/0321761 A1, Oct. 12, 2023
Int. Cl. B23K 26/53 (2014.01); B23K 26/364 (2014.01); H01L 21/268 (2006.01); H01L 21/304 (2006.01); H01L 21/78 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/53 (2015.10) [H01L 21/268 (2013.01); B23K 2103/56 (2018.08)] 8 Claims
OG exemplary drawing
 
1. A laser processing method in which a plate-shaped workpiece is irradiated with a laser beam and processing is executed, the laser processing method comprising:
a first processing step of forming a first processing mark in the workpiece by executing processing to form an origin of a first dividing groove through executing irradiation with the laser beam in a first direction; and
a second processing step of forming a second processing mark in the workpiece by executing processing to form an origin of a second dividing groove through executing irradiation with the laser beam in a second direction that intersects the first direction,
wherein an unprocessed region in which the processing is not executed is remains at an intersection at which the first direction and the second direction intersect each other in the first processing step or the second processing step,
the laser processing method further comprising an unprocessed region processing step of processing the unprocessed region, wherein the unprocessed region processing step includes:
forming first coupling processing marks in the workpiece that couple the first processing mark and the second processing mark to each other by executing processing to form an origin of a first coupling dividing groove through executing irradiation with the laser beam in a direction arising from setting an inclination with respect to the first direction or the second direction,
forming second coupling processing marks in the workpiece that couple the first processing mark and the second processing mark to each other by executing processing to form an origin of a second coupling dividing groove through executing irradiation with the laser beam in a direction arising from setting an inclination with respect to the first direction or the second direction,
wherein the first coupling processing marks and the second coupling processing marks are not coupled to each other at the same place on the first dividing groove.