US 12,290,880 B2
Curved quasi-non-diffracting laser beams for laser processing of transparent workpieces
Craig John Mancusi Ungaro, Corning, NY (US)
Assigned to CORNING INCORPORATED, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Jun. 19, 2020, as Appl. No. 16/906,107.
Claims priority of provisional application 62/869,272, filed on Jul. 1, 2019.
Prior Publication US 2021/0001430 A1, Jan. 7, 2021
Int. Cl. B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/38 (2014.01); B23K 26/53 (2014.01); B28D 5/00 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/53 (2015.10) [B23K 26/009 (2013.01); B23K 26/0622 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/38 (2013.01); B23K 2103/54 (2018.08)] 13 Claims
OG exemplary drawing
 
1. A method for processing a transparent workpiece, the method comprising:
directing a laser beam oriented along a beam path and propagating in a beam propagation direction into the transparent workpiece such that a portion of the laser beam directed into the transparent workpiece comprises a laser beam focal arc and generates an induced absorption within the transparent workpiece, the induced absorption producing a defect within the transparent workpiece, wherein the laser beam focal arc comprises:
curvature;
a wavelength λ;
a spot size w0; and
a Rayleigh range ZR that is greater than

OG Complex Work Unit Math
where FD is a dimensionless divergence factor comprising a value of 10 or greater, wherein the curvature is produced by impinging the laser beam on a phase-altering optical element, wherein the phase-altering optical element comprises a phase function

OG Complex Work Unit Math
wherein xp(z) and yp(z) are line shift functions quantifying a line shift direction that determines the curvature of the laser beam focal arc.