US 11,974,419 B1
Method, systems, and apparatuses for electromagnetic shielding
Florian Perminjat, Saint Romans (FR); Karine Saxod, Porte de Savoie (FR); and Etienne Brosse, Sassenage (FR)
Filed by STMicroelectronics International N.V., Geneva (CH)
Filed on Jun. 13, 2023, as Appl. No. 18/209,018.
Int. Cl. H05K 9/00 (2006.01); H01L 23/552 (2006.01); H01L 31/167 (2006.01); H01L 23/60 (2006.01)
CPC H05K 9/0058 (2013.01) [H01L 23/552 (2013.01); H01L 31/167 (2013.01); H05K 9/0084 (2013.01); H05K 9/0088 (2013.01); H01L 23/60 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing electromagnetic shielding comprising:
providing a substrate with an optical device attached and an RF can attached, wherein the RF can includes a first aperture aligned with an optical axis of the optical device;
depositing a deposition layer, wherein the deposition layer includes at least a first portion of the deposition layer and a second portion of the deposition layer, wherein the first portion of the deposition layer is deposited across the first aperture of the RF can and includes a second aperture that is narrower than the first aperture and aligned with the optical axis, wherein a second portion of the deposition layer is deposited on the RF can and a first terminal of the substrate, and wherein the first portion of the deposition layer and the second portion of the deposition layer are not connected;
curing the deposition layer; and
wherein the cured deposition layer electrically couples to the RF can and to the first terminal of the substrate to provide a first electromagnetic shield for at least the optical device.