US 11,973,441 B2
MEMS nanopositioner and method of fabrication
Seyed Omid Reza Moheimani, Allen, TX (US); Afshin Alipour, Richardson, TX (US); and Mustafa Bulut Coskun, Pasadena, CA (US)
Assigned to Board of Regents, The University of Texas System, Austin, TX (US)
Filed by Board of Regents, The University of Texas System, Austin, TX (US)
Filed on Dec. 20, 2021, as Appl. No. 17/645,229.
Claims priority of provisional application 63/127,763, filed on Dec. 18, 2020.
Prior Publication US 2022/0368249 A1, Nov. 17, 2022
Int. Cl. H02N 1/06 (2006.01); G01Q 10/04 (2010.01); G01Q 60/16 (2010.01); H02N 1/00 (2006.01)
CPC H02N 1/006 (2013.01) [G01Q 60/16 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A microelectromechanical (MEMS) device comprising:
a substrate; and
a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate; wherein the movable structure further comprising:
a tip segment comprising a STM tip configured to establish a tunneling current; and
an actuation segment mechanically connected to the tip segment by an oxide bridge, wherein the actuation segment is configured to move the movable structure, wherein the oxide bridge provides electrical isolation between the tip segment and the actuation segment, and wherein the tip segment, the actuation segment and the oxide bridge share a device layer of a single SOI wafer.