US 11,972,989 B2
Display substrate and method for detecting broken fanout wire of display substrate
Li Xiao, Beijing (CN); Dongni Liu, Beijing (CN); Minghua Xuan, Beijing (CN); Jiao Zhao, Beijing (CN); Haoliang Zheng, Beijing (CN); Zhenyu Zhang, Beijing (CN); Liang Chen, Beijing (CN); Hao Chen, Beijing (CN); Jing Liu, Beijing (CN); and Qi Qi, Beijing (CN)
Assigned to BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/253,960
Filed by BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Nov. 29, 2019, PCT No. PCT/CN2019/122080
§ 371(c)(1), (2) Date Dec. 18, 2020,
PCT Pub. No. WO2021/102945, PCT Pub. Date Jun. 3, 2021.
Prior Publication US 2021/0375702 A1, Dec. 2, 2021
Int. Cl. H01L 21/66 (2006.01); G01R 31/54 (2020.01); G01R 31/58 (2020.01); H01L 23/00 (2006.01); H01L 25/16 (2023.01); H01L 27/12 (2006.01); H10K 59/131 (2023.01)
CPC H01L 22/32 (2013.01) [G01R 31/54 (2020.01); G01R 31/58 (2020.01); H01L 22/22 (2013.01); H01L 24/02 (2013.01); H01L 27/124 (2013.01); H10K 59/131 (2023.02); H01L 25/167 (2013.01); H01L 2224/02321 (2013.01); H01L 2224/02375 (2013.01); H01L 2224/02379 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method for detecting a broken fanout wire of a display substrate, wherein the display substrate comprises: a base substrate having a first surface and a second surface that am opposite to each other, and a plurality of connection structures arranged at intervals on the first surface, and each connection structure comprises a first pad, a second pad and a fanout wire that electrically connects the first pad to the second pad; and the method for detecting a broken fanout wire comprises:
forming at least one detection unit, the forming of the detection unit comprising connecting at least two connection structures in series through a connecting part; and
measuring a head and an end of the detection unit to obtain resistance of the detection unit, and determining whether there is a broken fanout wire in the detection unit,
wherein each detection unit comprises a plurality of detection sub-units; each detection sub-unit comprises M connection structures connected in series, M being an integer greater than or equal to 1, and the step of measuring the head and the end of the detection unit to obtain the resistance of the detection unit, and determining whether there is a broken fanout wire in the detection unit comprises:
measuring the head and the end of each detection unit to obtain the resistance of the detection unit, and determining whether there is a broken fanout wire in the detection unit according to a first preset condition and the obtained resistance of the detection unit, and
in a case there is a broken fanout wire in the detection unit, measuring the head and the end of each detection sub-unit or the detection unit having a broken fanout wire to find the broken fanout wire.