US 11,972,988 B2
Solar cell and photovoltaic module
Andreas Beinert, Freiburg (DE); and Ulrich Eitner, Freiburg (DE)
Assigned to FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V., Munich (DE)
Filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
Filed on Oct. 13, 2020, as Appl. No. 17/068,927.
Application 17/068,927 is a continuation of application No. PCT/EP2019/060184, filed on Apr. 18, 2019.
Claims priority of application No. 102018206155.6 (DE), filed on Apr. 20, 2018.
Prior Publication US 2021/0028076 A1, Jan. 28, 2021
Int. Cl. H01L 21/66 (2006.01); G01K 7/16 (2006.01); G01L 1/18 (2006.01); G01L 1/22 (2006.01); G01N 27/22 (2006.01); H01L 31/02 (2006.01); H01L 31/0216 (2014.01); H01L 31/0224 (2006.01); H01L 31/048 (2014.01); H02S 50/10 (2014.01)
CPC H01L 22/30 (2013.01) [G01K 7/16 (2013.01); G01L 1/18 (2013.01); G01L 1/22 (2013.01); G01N 27/223 (2013.01); H01L 31/02008 (2013.01); H01L 31/02168 (2013.01); H01L 31/022425 (2013.01); H01L 31/048 (2013.01); H02S 50/10 (2014.12)] 18 Claims
OG exemplary drawing
 
15. A method of manufacturing a solar cell comprising a layer stack comprising at least the following features:
a substrate;
at least one doped region comprising an emitter layer within the substrate;
at least one metallization structure;
a sensor in the form of a strain gauge sensor;
the sensor being integrated in the emitter layer in the layer stack, said method comprising:
providing the substrate;
forming the at least one doped region in or on the substrate comprising forming an emitter layer in the substrate; and
forming the at least one metallization structure on the at least one doped region;
wherein a sensor is integrated into the emitter layer of the layer stack during the forming of the at least one doped region.