US 11,972,965 B2
Method and apparatus for substrate transport apparatus position compensation
Jairo T. Moura, Marlborough, MA (US); Robert T. Caveney, Windham, NH (US); Bing Yin, Southborough, MA (US); Nathan Spiker, Boston, MA (US); and Vincent W. Tsang, Lincoln, MA (US)
Assigned to Brooks Automation US, LLC, Chelmsford, MA (US)
Filed by Brooks Automation, Inc., Chelmsford, MA (US)
Filed on Feb. 15, 2022, as Appl. No. 17/651,183.
Application 16/872,864 is a division of application No. 15/880,387, filed on Jan. 25, 2018, granted, now 10,651,067, issued on May 12, 2020.
Application 17/651,183 is a continuation of application No. 16/872,864, filed on May 12, 2020, granted, now 11,251,059.
Claims priority of provisional application 62/450,818, filed on Jan. 26, 2017.
Prior Publication US 2022/0172973 A1, Jun. 2, 2022
Int. Cl. H01L 21/677 (2006.01); B25J 9/00 (2006.01); B25J 9/10 (2006.01); B25J 9/12 (2006.01); B25J 9/16 (2006.01); B25J 11/00 (2006.01); G05B 19/418 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/67742 (2013.01) [B25J 9/0027 (2013.01); B25J 9/107 (2013.01); B25J 9/126 (2013.01); B25J 9/1605 (2013.01); B25J 11/0095 (2013.01); G05B 19/4189 (2013.01); H01L 21/67161 (2013.01); H01L 21/67196 (2013.01); H01L 21/681 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A substrate transport apparatus comprising:
a frame;
a drive section connected to the frame;
a transport arm, operably connected to the drive section, the arm being articulated and having an end effector, with a substrate holder, movable relative to the frame between a first position and a second position, different from the first position, in a transport space defined by articulation of the transport arm along at least one axis of motion relative to the frame; and
a controller operably connected to the drive section so as to effect articulation of the transport arm, the controller comprising an arm bend compensator configured so that the arm bend compensator resolves, based on arm bend compensator calculation of an uncommanded arm displacement distance of the transport arm, due to uncommanded arm geometry changes, between the first position and second position.