| CPC H10K 59/122 (2023.02) [H10K 59/124 (2023.02); H10K 59/1201 (2023.02)] | 9 Claims |
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1. A method of manufacturing a display device, the method comprising:
forming a substrate, the substrate including a first base layer, a first barrier layer, a second base layer, and a second barrier layer, which are sequentially stacked one on another;
forming a first groove by either removing portions of the second base layer and the second barrier layer, or removing a portion of the second barrier layer;
filling the first groove with a first siloxane layer comprising siloxane;
forming a plurality of display elements arranged over the substrate and not overlapping the first groove;
forming a pixel circuit layer between the substrate and the display elements and including a pixel circuit and an insulation layer;
forming a second groove by removing a portion of the insulation layer of the pixel circuit layer to expose an upper surface of the first siloxane layer;
filling the second groove with a second siloxane layer comprising siloxane;
forming a third siloxane layer comprising siloxane on the second siloxane layer; and
disposing a component below the substrate to overlap the first groove and the second groove,
wherein
the first and second base layers include a polymer resin and the first and second barrier layers include an inorganic material.
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