| CPC H10D 89/011 (2025.01) [H01L 21/304 (2013.01)] | 2 Claims |
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1. A processing method for processing a single-crystal silicon wafer that has a first surface and a second surface located on an opposite side to the first surface that are formed in such a manner that a specific crystal plane included in a crystal plane {100} is exposed in each of the first surface and the second surface and has devices each formed in corresponding one of multiple regions marked out by multiple planned dividing lines set in a lattice manner in the first surface, the processing method comprising:
a dividing origin forming step of forming dividing origins for dividing the single-crystal silicon wafer along each planned dividing line at least at a depth corresponding to a finished thickness of device chips;
a separation layer forming step of forming a separation layer along the crystal plane of the second surface at a depth corresponding to a position on a side of the second surface relative to the dividing origins through positioning a focal point of a pulsed laser beam having such a wavelength as to be transmitted through the single-crystal silicon wafer to an inside of the single-crystal silicon wafer and relatively moving the focal point and the single-crystal silicon wafer along a first direction that is parallel to the crystal plane of the second surface and in which an acute angle formed between the first direction and a crystal orientation <100> is equal to or smaller than 5°; and
a separation step of separating the single-crystal silicon wafer into a first-surface-side wafer including multiple devices formed on a side of the first surface and a second-surface-side wafer that is located on the side of the second surface and does not include the devices by using the separation layer as an origin after the dividing origin forming step and the separation layer forming step, wherein
the separation layer forming step has
a modified region forming step of forming modified regions by relatively moving the focal point of the laser beam and the single-crystal silicon wafer along the first direction, and
an indexing feed step of executing indexing feed of the focal point and the single-crystal silicon wafer relatively in a second direction that is parallel to the crystal plane of the second surface and is orthogonal to the first direction, and
the separation layer includes the modified regions and cracks that extend with the modified regions being origins.
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