US 12,289,092 B2
Clock device
Marc Sansa Perna, Grenoble (FR); and Philippe Robert, Grenoble (FR)
Assigned to COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Appl. No. 17/757,308
Filed by Commissariat à l'Energie Atomique et aux Energies Alternatives, Paris (FR)
PCT Filed Dec. 10, 2020, PCT No. PCT/EP2020/085612
§ 371(c)(1), (2) Date Jun. 14, 2022,
PCT Pub. No. WO2021/122331, PCT Pub. Date Jun. 24, 2021.
Claims priority of application No. 1914510 (FR), filed on Dec. 16, 2019.
Prior Publication US 2022/0416150 A1, Dec. 29, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 9/24 (2006.01)
CPC H03H 9/02259 (2013.01) [H03H 2009/0244 (2013.01); H03H 9/2436 (2013.01); H03H 2009/2442 (2013.01)] 15 Claims
OG exemplary drawing
 
1. Square-extensional mode clock signal generation device comprising:
a microelectromechanical resonant element overhanging a surface of a substrate and having, in top view, a square shape and, at each corner of the square shape, a beam arranged perpendicularly to a diagonal of the square shape running through the corner, the ends of each beam being respectively coupled to the substrate by anchorages perpendicular to an axis of the beam; and
four nanoelectromechanical transduction elements arranged perpendicularly to the beams and continuing the diagonals of the square shape, each of the four nanoelectromechanical transduction elements being coupled to one of the beams and further coupled to the substrate by an anchorage.