US 12,288,707 B2
Substrate holder
Matsutaro Miyamoto, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on May 1, 2023, as Appl. No. 18/141,739.
Application 18/141,739 is a division of application No. 16/401,841, filed on May 2, 2019, granted, now 11,676,837.
Claims priority of application No. 2018-122083 (JP), filed on Jun. 27, 2018.
Prior Publication US 2023/0268209 A1, Aug. 24, 2023
Int. Cl. H01L 21/673 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/673 (2013.01) [C25D 17/001 (2013.01); C25D 17/06 (2013.01); H01L 21/68721 (2013.01); H01L 21/68785 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate holder for holding a substrate by interposing the substrate between frames, the substrate holder comprising:
a front frame;
a rear frame;
a first sealing member mounted on at least one of the front frame and the rear frame, the first sealing member being configured to contact the substrate; and
one or a plurality of clampers that clamp the front frame and the rear frame, wherein each of the one or the plurality of clampers comprises:
a hook base including a hook, the hook base being mounted on the one of the front frame and the rear frame;
a plate including a claw, the plate being mounted on the other of the front frame and the rear frame;
each of the front frame and the rear frame has an opening therethrough the hook of the hook base or the claw of the plate passes; wherein
at least one of the hook base and the plate is fixed to the front frame or the rear frame by a fixture via an elastic supporting member such that the at least one of the hook base and the plate is movable in a direction perpendicular to the surface of the substrate.