| CPC H01J 37/32183 (2013.01) [H03H 7/38 (2013.01); H01J 2237/24564 (2013.01)] | 20 Claims |
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1. A hybrid matcher, comprising:
a first matching circuit in which a plurality of variable element-switch sets are connected to each other in parallel, the variable element-switch sets each including a variable impedance element and a switch connected to the variable impedance element in series and electrically operating therewith;
a sensor disposed at a front stage of the first matching circuit, and configured to measure a current and a voltage of radio frequency (RF) power applied from an RF generator, the RF power including a multi-level pulse that is periodically repeated each level of the multi-level pulse corresponding to a different state of the multi-level pulse;
a variable element driver configured to drive the variable impedance elements of the variable element-switch sets of the first matching circuit;
a switch driver configured to drive the switches of the variable element-switch sets of the first matching circuit; and
a controller configured to control the variable element driver and the switch driver,
wherein first and second variable element-switch sets of the first matching circuit are assigned to corresponding first and second states of the multi-level pulse, and
wherein, in response to the first or the second state of the multi-level pulse, the switch driver turns on the switch of the corresponding first or second variable element-switch set of the first matching circuit assigned to the corresponding state.
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