US 12,288,673 B2
Retuning for impedance matching network control
Anthony Oliveti, San Jose, CA (US); Daniel Catalan, San Jose, CA (US); and Liang Ouyang, San Jose, CA (US)
Assigned to COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed by COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed on Mar. 3, 2022, as Appl. No. 17/685,764.
Application 17/685,764 is a continuation in part of application No. 16/768,224, granted, now 11,290,080, previously published as PCT/US2018/062951, filed on Nov. 29, 2018.
Claims priority of provisional application 62/592,319, filed on Nov. 29, 2017.
Prior Publication US 2022/0189740 A1, Jun. 16, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 14/54 (2006.01); H03H 7/38 (2006.01)
CPC H01J 37/32183 (2013.01) [C23C 14/54 (2013.01); H03H 7/38 (2013.01); H01J 2237/332 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A matching network system, comprising:
an input sensor that, in operation, senses a current value, a voltage value, and a phase value between the current value and the voltage value of an RF input signal;
a controller coupled to the input sensor, the controller programmed to:
determine a phase error value and a magnitude error value;
perform tuning of the matching network, the tuning comprising:
performing a first tuning algorithm wherein:
a first adjustment for a position of a first variable capacitor is determined based on the magnitude error value; and
a second adjustment for a position of a second variable capacitor is determined based on the phase error value;
performing a second tuning algorithm wherein:
a third adjustment for the position of the first variable capacitor is determined based on a first composite value of the magnitude error value and the phase error value; and
a fourth adjustment for the position of the second variable capacitor is determined based on a second composite value of the magnitude error value and the phase error value;
using a blended mode tuning that provides a scaling factor influence to reduce an influence of composite error signals as the matching network converges on a tuning point, the blended mode tuning to apply one or more adjustments by:
applying a first weighting factor to the first adjustment and a second weighting factor to the third adjustment to create a blended first adjustment;
applying a third weighting factor to the second adjustment and a fourth weighting factor to the fourth adjustment to create a blended second adjustment;
adjusting the first variable capacitor based on the blended first adjustment; and
adjusting the second variable capacitor based on the blended second adjustment;
determining whether a dead-zone has occurred; and
if a dead-zone has occurred, then changing at least the first weighting factor and the second weighting factor or the third weighting factor and the fourth weighting factor prior to repeating the using the blended mode tuning to apply one or more adjustments.