US 12,288,670 B2
Pulsed DC power for deposition of film
Abhijeet Laxman Sangle, Maharashtra (IN); Nilesh Patil, Dist Thane (IN); Vijay Bhan Sharma, Rajasthan (IN); and Visweswaren Sivaramakrishnan, Cupertino, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 2, 2022, as Appl. No. 17/684,911.
Claims priority of provisional application 63/155,604, filed on Mar. 2, 2021.
Prior Publication US 2022/0285129 A1, Sep. 8, 2022
Int. Cl. C23C 14/34 (2006.01); C23C 14/08 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/02 (2006.01)
CPC H01J 37/32064 (2013.01) [C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/3485 (2013.01); H01J 37/3426 (2013.01); H01J 2237/332 (2013.01); H01L 21/02178 (2013.01); H01L 21/02194 (2013.01); H01L 21/02197 (2013.01); H01L 21/02266 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of depositing a dielectric film in a high aspect ratio feature of a semiconductor substrate, the method comprising:
applying power to a dielectric target within a vacuum chamber to generate a plasma in a process gap between the dielectric target and a substrate support, the power being a pulsed DC power having pulsed DC waveform, the pulsed DC waveform comprising a plurality of ON pulses and a plurality of OFF pulses, each of the ON pulses and the OFF pulses independently being in a range of from 1 μs to 50 μs, a voltage of the plurality of ON pulses being in a range of from greater than 9 V to 1500V, the pulsed DC waveform being generated at a frequency in a range of from 10 KHz to 500 kHz, and the pulsed DC waveform having a duty cycle in a range of from greater than 0 to less than 0.6;
pulsing the power applied to the dielectric target to prevent charge accumulation; and
applying a reverse bias to the substrate support using a reverse bias source, wherein the reverse bias source is AC power, DC power, or RF power, and wherein the reverse bias source is not pulsed,
the high aspect ratio feature having a height:width ratio greater than or equal to 10:1.