US 12,288,664 B2
Particle beam device having a deflection unit
Dirk Preikszas, Oberkochen (DE); and Michael W. Phaneuf, Ottawa (CA)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Mar. 16, 2022, as Appl. No. 17/695,879.
Claims priority of application No. 102021112503.0 (DE), filed on May 12, 2021.
Prior Publication US 2022/0367142 A1, Nov. 17, 2022
Int. Cl. H01J 37/147 (2006.01); H01J 37/08 (2006.01); H01J 37/09 (2006.01); H01J 37/10 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/1472 (2013.01) [H01J 37/08 (2013.01); H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/244 (2013.01); H01J 2237/0451 (2013.01); H01J 2237/06341 (2013.01); H01J 2237/103 (2013.01); H01J 2237/151 (2013.01); H01J 2237/152 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A particle beam device for imaging, analyzing and/or processing an object, comprising:
an optical axis;
a first particle beam generator that generates a first particle beam having first charged particles, wherein the first particle beam generator has a first generator beam axis, wherein the optical axis and the first generator beam axis are identical;
a second particle beam generator that generates a second particle beam having second charged particles, wherein the second particle beam generator has a second generator beam axis, wherein the optical axis and the second generator beam axis are arranged at an angle being different from 0° and 180°;
a deflection unit that deflects the second charged particles from the second generator beam axis to the optical axis and along the optical axis, the deflection unit configured to have a first operation mode in which the first charged particles of the first particle beam are guided along the optical axis without being deflected by the deflection unit and the deflection unit configured to have a second operation mode in which the second charged particles of the second particle beam are deflected by the deflection unit from the second generator beam axis to the optical axis and are guided further along the optical axis and the deflection unit configured to operate in one of the first operation mode or the second operation mode, wherein the deflection unit has a first opening and a second opening being different from the first opening, wherein the optical axis runs through the first opening, wherein the second generator beam axis runs through the second opening;
at least one objective lens that focuses the first particle beam or the second particle beam onto the object, wherein the optical axis runs through the objective lens; and
at least one detector that detects interaction particles and/or interaction radiation, the interaction particles and the interaction radiation being generated when the first particle beam or the second particle beam impinges on the object.