US 12,287,584 B2
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Alexander Ypma, Veldhoven (NL); Jasper Menger, Eindhoven (NL); David Deckers, Turnhout (BE); David Han, Tilburg (NL); Adrianus Cornelis Matheus Koopman, Hilversum (NL); Irina Lyulina, Son (NL); Scott Anderson Middlebrooks, Veldhoven (NL); Richard Johannes Franciscus Van Haren, Waalre (NL); and Jochem Sebastiaan Wildenberg, Aarle-Rixtel (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Aug. 10, 2023, as Appl. No. 18/232,570.
Application 18/232,570 is a continuation of application No. 17/836,099, filed on Jun. 9, 2022, granted, now 11,940,740.
Application 17/836,099 is a continuation of application No. 16/864,456, filed on May 1, 2020, granted, now 11,385,550.
Application 16/864,456 is a continuation of application No. 16/351,873, filed on Mar. 13, 2019, granted, now 10,642,162.
Application 16/351,873 is a continuation of application No. 15/915,674, filed on Mar. 8, 2018, granted, now 10,274,834.
Application 15/915,674 is a continuation of application No. 15/025,856, granted, now 9,946,165, previously published as PCT/EP2014/068932, filed on Sep. 5, 2014.
Claims priority of provisional application 61/885,977, filed on Oct. 2, 2013.
Prior Publication US 2024/0019788 A1, Jan. 18, 2024
Int. Cl. G03F 7/00 (2006.01); G03F 9/00 (2006.01); G06F 16/26 (2019.01)
CPC G03F 7/706837 (2023.05) [G03F 7/70525 (2013.01); G03F 7/70616 (2013.01); G03F 9/7092 (2013.01); G06F 16/26 (2019.01)] 20 Claims
OG exemplary drawing
 
1. A non-transitory computer program product comprising machine readable instructions stored therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:
obtain measurement data comprising measurement values corresponding to different modes of measurement of a sensor system configured to sample on one or more marks on a physical product unit that has been subjected to a semiconductor manufacturing process;
identify one or more components indicative of deformation of the one or more marks based on a result of a multivariate analysis applied to the measurement data or to previous measurement data; and
use the measurement data and the identified one or more components to determine a preferred mode of measurement for the sensor system based on a reduced impact of the deformation of the one or more marks on the accuracy of a measurement value obtained by the sensor system.