US 12,287,577 B2
Electronic device and method for manufacturing target substrate
Chien-Hsing Lee, Miao-Li County (TW); Chin-Lung Ting, Miao-Li County (TW); Jung-Chuan Wang, Miao-Li County (TW); and Hong-Sheng Hsieh, Miao-Li County (TW)
Assigned to INNOLUX CORPORATION, Miao-Li County (TW)
Filed by InnoLux Corporation, Miao-Li County (TW)
Filed on Dec. 5, 2023, as Appl. No. 18/528,914.
Application 17/681,145 is a division of application No. 16/715,929, filed on Dec. 16, 2019, granted, now 11,294,273, issued on Apr. 5, 2022.
Application 18/528,914 is a continuation of application No. 17/681,145, filed on Feb. 25, 2022, granted, now 11,868,040.
Claims priority of provisional application 62/925,922, filed on Oct. 25, 2019.
Prior Publication US 2024/0103356 A1, Mar. 28, 2024
Int. Cl. G03F 7/36 (2006.01); G03F 1/60 (2012.01); G03F 7/09 (2006.01); G03F 7/20 (2006.01)
CPC G03F 7/2002 (2013.01) [G03F 1/60 (2013.01); G03F 7/093 (2013.01); G03F 7/36 (2013.01)] 16 Claims
 
1. An electronic device, comprising:
a base; and
a conductive layer disposed on the base and patterned by a plurality of processes, wherein the plurality of processes comprise:
providing a mask substrate, wherein the mask substrate comprises a first substrate and a patterned substrate, wherein in a cross-sectional view, a width of the first substrate is greater than or equal to a width of the patterned substrate;
arranging the mask substrate and the base correspondingly;
performing exposure and development processes on the conductive layer for patterning the conductive layer; and
removing the mask substrate.