US 12,287,352 B2
Ultra-low power readout circuit with high-voltage bias generation for MEMS accelerometer
Yimai Peng, Ann Arbor, MI (US); David Blaauw, Ann Arbor, MI (US); Dennis Sylvester, Ann Arbor, MI (US); and David Kyojin Choo, Ann Arbor, MI (US)
Assigned to The Regents of The University of Michigan, Ann Arbor, MI (US)
Filed by THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US)
Filed on Nov. 9, 2022, as Appl. No. 17/983,463.
Claims priority of provisional application 63/263,778, filed on Nov. 9, 2021.
Prior Publication US 2023/0146711 A1, May 11, 2023
Int. Cl. G01P 15/125 (2006.01); G01P 15/08 (2006.01)
CPC G01P 15/125 (2013.01) [G01P 2015/0862 (2013.01)] 19 Claims
OG exemplary drawing
 
8. A method for operating a low power motion sensing system, comprising:
providing a motion sensor with a proof mass and cantilever beams, producing acceleration signals with its capacitance change;
directly coupling output terminals of the motion sensor to an input amplifier of a readout circuit without signal chopping; and
supplying high bias voltages to the motion sensor, where the magnitude of the bias voltage is such that an output signal of the motion sensor is larger than a flicker noise associated with the readout circuit.