US 12,287,286 B2
Inspection device
Syusaku Yamamoto, Tokyo (JP); Keisuke Kajikawa, Tokyo (JP); Yuichiro Kamino, Tokyo (JP); Hiroaki Minamide, Saitama (JP); and Koji Nawata, Saitama (JP)
Assigned to MITSUBISHI HEAVY INDUSTRIES, LTD., Tokyo (JP); and RIKEN, Saitama (JP)
Filed by MITSUBISHI HEAVY INDUSTRIES, LTD., Tokyo (JP); and RIKEN, Saitama (JP)
Filed on Feb. 17, 2023, as Appl. No. 18/170,865.
Claims priority of application No. 2022-036204 (JP), filed on Mar. 9, 2022.
Prior Publication US 2023/0288327 A1, Sep. 14, 2023
Int. Cl. G01N 21/21 (2006.01); G01N 21/3581 (2014.01); G01N 21/47 (2006.01)
CPC G01N 21/3581 (2013.01) [G01N 21/21 (2013.01); G01N 2021/216 (2013.01); G01N 2021/4709 (2013.01); G01N 2021/4792 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An inspection device comprising:
a light source for outputting pulsed excitation light with a time width of 10 picoseconds to 10 nanoseconds;
a nonlinear optical crystal for generating a terahertz wave by optical wavelength conversion of the pulsed excitation light;
a polarization part for reflecting at least a part of a reflected wave of the terahertz wave reflected by an inspection target; and
a detector for detecting the reflected wave reflected by the polarization part,
wherein the terahertz wave is a linearly polarized wave, and
wherein the polarization part includes:
a first polarizer for reflecting a component of the reflected wave having a plane of polarization different from a plane of polarization of the terahertz wave; and
a second polarizer for transmitting the component reflected by the first polarizer.
 
4. An inspection device comprising:
a light source for outputting pulsed excitation light with a time width of 10 picoseconds to 10 nanoseconds;
a nonlinear optical crystal for generating a terahertz wave by optical wavelength conversion of the pulsed excitation light;
a polarization part for reflecting at least a part of a reflected wave of the terahertz wave reflected by an inspection target; and
a detector for detecting the reflected wave reflected by the polarization part,
wherein the terahertz wave is a linearly polarized wave, and
wherein the polarization part includes:
a first polarizer for reflecting a component of the reflected wave having a plane of polarization different from a plane of polarization of the terahertz wave; and
a second polarizer for reflecting the component reflected by the first polarizer.