US 12,287,249 B2
Resonating sensor for high-pressure and high-temperature environments
Didier Pohl, Paris (FR); Florian Risser, Marseilles (FR); Jacques Sellin, Cestas (FR); Patrice Ligneul, Chaville (FR); Kamran Danaie, Clamart (FR); Mihir Patel, Hopkinton, MA (US); and Boris Valkov, Clamart (FR)
Assigned to SCHLUMBERGER TECHNOLOGY CORPORATION, Sugar Land, TX (US)
Filed by Schlumberger Technology Corporation, Sugar Land, TX (US)
Filed on Jun. 5, 2024, as Appl. No. 18/734,511.
Application 18/734,511 is a continuation of application No. 18/360,098, filed on Jul. 27, 2023, granted, now 12,025,512.
Application 18/360,098 is a continuation of application No. 16/544,595, filed on Aug. 19, 2019, granted, now 11,754,452, issued on Sep. 12, 2023.
Claims priority of provisional application 62/719,421, filed on Aug. 17, 2018.
Prior Publication US 2024/0319027 A1, Sep. 26, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01L 1/16 (2006.01); G01L 9/00 (2006.01); H03H 9/21 (2006.01); H03H 9/215 (2006.01)
CPC G01L 1/162 (2013.01) [G01L 9/0022 (2013.01); G01L 9/0025 (2013.01); H03H 9/21 (2013.01); H03H 9/215 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a substrate;
a sensor element including a double-ended tuning fork piezoelectric resonator having a first tine and a second tine, wherein:
the double-ended tuning fork piezoelectric resonator is formed in the substrate;
the double-ended tuning fork piezoelectric resonator is configured to vibrate at a first frequency;
the substrate includes an additional piezoelectric resonator;
the additional piezoelectric resonator is configured to vibrate at a second frequency that is at least two orders of magnitude greater than the first frequency;
the first tine and the second tine are positioned within an aperture of the substrate;
the first tine and the second tine are spaced apart from one another so as to form a slot between the first tine and the second tine;
a width of the slot from the first tine to the second tine, the width of the slot measured orthogonally to lengths of the first tine and the second tine, varies along the lengths of the first tine and the second tine;
opposite sides of the first tine are inwardly tapered continuously toward a middle of the first tine; and
opposite sides of the second tine are inwardly tapered continuously toward a middle of the second tine; and
a body including caps coupled to the sensor element, wherein the double-ended tuning fork piezoelectric resonator is enclosed within a cavity of the body.