| CPC G01C 19/574 (2013.01) [G01C 19/5769 (2013.01)] | 15 Claims |
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1. A microelectromechanical resonator comprising:
a first proof mass and a second proof mass that lie in an xy-plane, such that the first proof mass and the second proof mass are aligned on a lateral axis extending in a lateral direction in the xy-plane, and a transversal axis extends in a transversal direction that is perpendicular to the lateral direction; and
a first lateral anti-phase coupling structure that couples the first proof mass to the second proof mass and includes:
a first seesaw lever and a first force-displacement lever,
a first joint that extends from a first joint connection point on the first seesaw lever to a second joint connection point on the first force-displacement lever,
a first mass connection element that extends from the first proof mass to a first mass connection point on the first seesaw lever, and
a second mass connection element that extends from the second proof mass to a second mass connection point on the first force-displacement lever,
wherein the first seesaw lever is suspended from a first anchor point by at least one flexible first suspender attached to the first seesaw lever at a first seesaw suspension point, and the at least one flexible first suspender configures the first seesaw lever to turn around the first seesaw suspension point in the xy-plane,
wherein the first seesaw suspension point lies between the first joint connection point and the first mass connection point on the first seesaw lever, and
wherein the first seesaw suspension point lies closer to the first joint connection point than to the first mass connection point, and
the first force-displacement lever is suspended from a second anchor point by at least one flexible second suspender attached to the first force-displacement lever at a first force-displacement suspension point, and the at least one flexible second suspender configures the first force-displacement lever to turn around the first force-displacement suspension point in the xy-plane, and
both the second joint connection point and second mass connection point lie on a same side of the first force-displacement suspension point on the first force-displacement lever.
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