US 12,287,202 B2
Vibrating-type gyroscope element and angular velocity sensor comprising same
Ryohei Uchino, Hyogo (JP); Takafumi Moriguchi, Hyogo (JP); and Naoki Okimoto, Hyogo (JP)
Assigned to SUMITOMO PRECISION PRODUCTS CO., LTD., Amagasaki (JP)
Appl. No. 18/002,823
Filed by Sumitomo Precision Products Co., Ltd., Hyogo (JP)
PCT Filed Jun. 24, 2021, PCT No. PCT/JP2021/024032
§ 371(c)(1), (2) Date Dec. 21, 2022,
PCT Pub. No. WO2022/004562, PCT Pub. Date Jan. 6, 2022.
Claims priority of application No. 2020-115611 (JP), filed on Jul. 3, 2020.
Prior Publication US 2023/0243653 A1, Aug. 3, 2023
Int. Cl. G01C 19/5684 (2012.01); B81B 3/00 (2006.01); G01C 19/5719 (2012.01); H10N 30/30 (2023.01)
CPC G01C 19/5684 (2013.01) [B81B 3/0086 (2013.01); G01C 19/5719 (2013.01); H10N 30/302 (2023.02); B81B 2201/0242 (2013.01); B81B 2203/04 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A vibrating-type gyroscope element, comprising at least:
a fixed part;
a resonator with a ring shape or a discoid shape;
a plurality of supports connecting the resonator to the fixed part and vibratably supporting the resonator; and
a plurality of electrodes formed in a plane of one of opposite of the resonator or in planes of the opposite surfaces of the resonator,
the resonator having a cos Nθ (where N is a natural number of two or more) mode of vibration,
two of the plurality of electrodes being arranged in each of 4N orientations that axes of the plurality of electrodes are arranged at equiangular intervals in an outer circumferential direction of the resonator,
the plurality of electrodes including:
a primary driving electrode that excites first order vibration of the resonator in the cos Nθ mode;
a primary pickoff electrode that detects the first order vibration;
a secondary pickoff electrode that detects second order vibration of the resonator; and
a secondary driving electrode that drives the resonator such that the second order vibration is canceled,
the primary pickoff electrode being arranged in a same one of the 4N orientations as the orientation of the primary driving electrode, and
the secondary driving electrode being arranged in a same on of the 4 N orientations as the orientation of the secondary pickoff electrode,
wherein:
the plurality of electrodes includes, in equal numbers, a set comprising the primary driving electrode and the primary pickoff electrode, and a set comprising the secondary driving electrode and the secondary pickoff electrode; and
the plurality of electrodes is provided in such a way that:
two electrodes extend in parallel with each other from a corresponding one of the plurality of supports to the resonator with a space kept between the two electrodes,
one of the electrodes is provided on one of the plurality of supports and is the primary driving electrode, and the other one of the electrodes is the primary pickoff electrode, and
one of the electrodes is provided on another of the plurality of supports and is the secondary driving electrode, and the other one of the electrodes is the secondary pickoff electrode.