US 12,287,151 B2
Thermal plate having a fluid channel
Jack Michael Thompson, Agoura Hills, CA (US)
Assigned to Teradyne, Inc., North Reading, MA (US)
Filed by Teradyne, Inc., North Reading, MA (US)
Filed on Feb. 26, 2021, as Appl. No. 17/186,145.
Prior Publication US 2022/0276008 A1, Sep. 1, 2022
Int. Cl. F28D 1/047 (2006.01); F24F 11/30 (2018.01); F24F 11/74 (2018.01); F24F 11/76 (2018.01)
CPC F28D 1/0477 (2013.01) [F24F 11/30 (2018.01); F24F 11/74 (2018.01); F24F 11/76 (2018.01); F28F 2210/02 (2013.01); F28F 2210/10 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system comprising:
a test instrument comprising a thermal plate configured to change a temperature of a device under test by flow of fluid through the thermal plate; and
a control system configured to control operation of the test instrument including the flow of fluid through the thermal plate;
wherein the thermal plate comprises a channel within the thermal plate configured to enable the flow of fluid between an input port and an output port, the thermal plate comprising a thermally conductive material to conduct heat between the device under test and the fluid, the channel comprising a first branch and a second branch that diverge, the first branch being configured to carry a first fluid flow comprising a first portion of the flow of fluid and the second branch being configured to carry a second fluid flow comprising a second portion of the flow of fluid, the first portion and the second portion being an entirety of the flow of fluid, the first branch and the second branch being configured to reconnect to thereby form an island among multiple islands in the channel and to merge the first fluid flow and the second fluid flow downstream of a point where the first branch and the second branch diverge, the island having a first side at a point where the first branch and the second branch diverge and a second side at a point where the first channel and the second channel reconnect, the second side having a shape that bows or curves inward at a center of the second side towards the first side.