| CPC C30B 25/186 (2013.01) [C23C 16/01 (2013.01); C23C 16/02 (2013.01); C23C 16/274 (2013.01); C25F 3/02 (2013.01); C25F 5/00 (2013.01); C30B 25/20 (2013.01); C30B 29/04 (2013.01); C30B 31/22 (2013.01); C30B 33/04 (2013.01); C30B 33/06 (2013.01); C30B 33/10 (2013.01); Y10T 428/24479 (2015.01); Y10T 428/2457 (2015.01); Y10T 428/24612 (2015.01)] | 1 Claim |

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1. A diamond, comprising:
a single crystal diamond layer having a set of main surfaces; and
a substrate containing implanted ions arranged on at least one of the main surfaces of the single crystal diamond layer,
wherein the substrate is divided into two layers by the implanted ions, the substrate containing implanted ions having line-shaped or lattice-shaped grooves penetrating to the single crystal diamond layer, and wherein the width of at least two of the grooves is more than or equal to 0.1 μm and less than or equal to 30 μm.
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