US 12,286,374 B2
Titanium-containing quartz glass having excellent UV absorption, and method for producing same
Atsushi Shimada, Koriyama (JP); Katsuhide Orikasa, Koriyama (JP); Makoto Tanaka, Koriyama (JP); Tomoichi Kumata, Koriyama (JP); and Hiromi Tarukawa, Koriyama (JP)
Assigned to Shin-Etsu Quartz Products Co., Ltd., Tokyo (JP); and Heraeus Quarzglas GmbH & Co. KG, Hanau (DE)
Appl. No. 17/601,624
Filed by Shin-Etsu Quartz Products Co., Ltd., Tokyo (JP); and Heraeus Quarzglas GmbH & Co. KG, Hanau (DE)
PCT Filed Jan. 17, 2020, PCT No. PCT/JP2020/001510
§ 371(c)(1), (2) Date Oct. 5, 2021,
PCT Pub. No. WO2020/202709, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 2019-072993 (JP), filed on Apr. 5, 2019.
Prior Publication US 2022/0204387 A1, Jun. 30, 2022
Int. Cl. C03C 3/06 (2006.01); C03B 32/00 (2006.01); C03C 4/08 (2006.01)
CPC C03C 3/06 (2013.01) [C03B 32/00 (2013.01); C03C 4/085 (2013.01); C03C 2201/42 (2013.01); C03C 2203/54 (2013.01)] 4 Claims
 
1. A titanium-containing quartz glass having excellent UV absorption comprising:
an average concentration of titanium between 10 ppm by mass and 500 ppm by mass;
an OH group concentration in a range of between 10 ppm by mass and 350 ppm by mass;
wherein the concentration of each of the elements Al, Li, Na, K, Ca, Mg, Fe, Ni, Cu, Cr, Mo and V is 50 ppb or less by mass;
wherein the total concentration of the elements Al, Li, Na, K, Ca, Mg, Fe, Ni, Cu, Cr, Mo and V is 150 ppb or less by mass;
wherein a chlorine concentration is less than 30 ppm by mass; and
wherein the titanium-containing quartz glass is colorless.