US 12,285,904 B2
Imprint apparatus, imprint method, and article manufacturing method
Takehiko Ueno, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 19, 2022, as Appl. No. 17/947,270.
Claims priority of application No. 2021-153347 (JP), filed on Sep. 21, 2021.
Prior Publication US 2023/0091051 A1, Mar. 23, 2023
Int. Cl. B29C 59/00 (2006.01); B29C 37/00 (2006.01); B29C 59/02 (2006.01); G03F 7/00 (2006.01)
CPC B29C 59/002 (2013.01) [B29C 59/026 (2013.01); G03F 7/0002 (2013.01); B29C 2037/90 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An imprint apparatus that transfers a pattern of a mold to an imprint material on a substrate, comprising:
the mold having a first surface including a pattern region in which the pattern is formed and a second surface, opposite the first surface, in which a cavity is formed;
a substrate holding unit having a substrate mounting surface on which the substrate is mounted;
a driving unit configured to drive the mold and press the mold against the substrate coated with the imprint material at three or more positions based on a center of the pattern region in the mold;
a deformation mechanism configured to deform the first surface of the mold into a convex shape when the mold and the substrate are facing each other, wherein atop portion of the convex shape of the first surface of the mold is defined by a center of the cavity formed in the second surface of the mold;
a mold measurement unit configured to measure a position of the pattern region of the mold in a Z direction perpendicular to the substrate mounting surface; and
a control unit configured to control a pressing force of the driving unit based on a distance in an XY plane parallel to the substrate mounting surface between the center of the pattern region in the mold and the top portion of the convex shape of the mold deformed by the deformation mechanism,
wherein the driving unit includes three actuators,
wherein the control unit is further configured to control the pressing force of the driving unit based on a reciprocal ratio of a distance in the XY plane between the three actuators of the driving unit and the top portion of the convex shape of the mold deformed by the deformation mechanism, and
wherein the reciprocal ratio of the distance in the XY plane between the three actuators of the driving unit and the top portion of the convex shape of the mold deformed by the deformation mechanism is defined by the following equations:
F1=F·(1/Lm1)/(1/Lm1+1/Lm2+1/Lm3),
F2=F·(1/Lm2)/(1/Lm1+1/Lm2+1/Lm3),
F3=F·(1/Lm3)/(1/Lm1+1/Lm2+1/Lm3), and
F=F1+F2+F3,
where Lm1, Lm2, and Lm3 represent distances in the XY plane between the top portion of the convex shape of the mold and pressing positions of the three actuators,
where F1, F2, and F3 represent pressing forces of the three actuators, and
where F represents the pressing force of the driving unit.