| CPC B23K 26/53 (2015.10) [B23K 26/0869 (2013.01)] | 20 Claims |

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1. A method for the laser machining of a workpiece by means of a machining beam, the workpiece having a material that is transparent to a wavelength λ of the machining beam, in which method material modifications are formed in the material along a predetermined machining line by action of the machining beam upon the material, a first group of spaced-apart material modifications is formed in the material, with mutually adjacent material modifications of the first group being formed one after the other in time and having a distance d0 from one another of at least 0.25*λ and/or at most 2.5*λ, and in which method a second group of spaced-apart material modifications is formed in the material, with mutually adjacent material modifications of the second group being formed one after the other in time and having a distance do from one another of at least 0.25*λ and/or at most 2.5*λ, and the shortest distance d1 between the material modifications of the first group and the material modifications of the second group being at least 5 μm.
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