US 12,285,215 B2
Systems and methods for measurement of optical workpieces
James Burge, Tucson, AZ (US); and Chunyu Zhao, Tucson, AZ (US)
Assigned to ARIZONA OPTICAL METROLOGY LLC, Tucson, AZ (US)
Filed by Arizona Optical Metrology LLC, Tucson, AZ (US)
Filed on Jun. 21, 2024, as Appl. No. 18/749,818.
Application 18/749,818 is a continuation of application No. 17/323,231, filed on May 18, 2021, granted, now 12,053,240.
Claims priority of provisional application 63/027,881, filed on May 20, 2020.
Prior Publication US 2024/0341587 A1, Oct. 17, 2024
Int. Cl. A61B 3/10 (2006.01); A61B 3/15 (2006.01); G01B 9/021 (2006.01)
CPC A61B 3/1015 (2013.01) [A61B 3/152 (2013.01); G01B 9/021 (2013.01)] 26 Claims
OG exemplary drawing
 
1. An apparatus for aligning an optical workpiece with a measurement system for measurement, the apparatus comprising:
the measurement system comprising:
a metrology system comprising a light source configured to produce light and a detector configured to detect return light; and
an optical system aligned with the optical metrology system, the optical system comprising:
an alignment hologram configured to produce alignment light in response to the light produced by the metrology system; and
a measurement hologram configured to produce measurement light in response to the light produced by the metrology system for measurement of the optical workpiece;
a measurement frame that locates the optical workpiece with respect to the measurement light produced by the measurement hologram for measurement of the optical workpiece; and
at least one alignment feature coupled to the measurement frame and configured to return the alignment light produced by the alignment hologram to the detector to align the measurement frame with respect to the measurement system.