US 12,284,747 B2
Hollow cathode discharge assistant transformer coupled plasma source and operation method of the same
Chwung-Shan Kou, Hsinchu County (TW)
Assigned to Finesse Technology Co., Ltd., Hsinchu (TW)
Filed by Finesse Technology Co., Ltd., Hsinchu County (TW)
Filed on Jul. 12, 2023, as Appl. No. 18/220,837.
Claims priority of provisional application 63/450,652, filed on Mar. 7, 2023.
Claims priority of application No. 112117349 (TW), filed on May 10, 2023.
Prior Publication US 2024/0306284 A1, Sep. 12, 2024
Int. Cl. H05H 1/46 (2006.01); H01F 27/24 (2006.01); H01F 27/28 (2006.01); H05H 1/00 (2006.01)
CPC H05H 1/4652 (2021.05) [H01F 27/24 (2013.01); H01F 27/28 (2013.01); H05H 1/01 (2021.05)] 22 Claims
OG exemplary drawing
 
1. A hollow cathode discharge assistant transformer coupled plasma source at least comprising:
a reaction chamber having an annular channel, wherein the reaction chamber further has a gas inlet and an outlet located at the annular channel of the reaction chamber; and
at least one ferrite transformer comprising a first ferrite magnetic core wound with a first coil, a second ferrite magnetic core wound with a second coil and a drive power source, wherein the annular channel of the reaction chamber passes through a hollow area between the first ferrite magnetic core and the second ferrite magnetic core,
wherein the drive power source applies an AC power supply with a first voltage to the first coil to generate an alternating magnetic field on the first ferrite magnetic core,
wherein the second coil generates a second voltage by inducing the alternating magnetic field, and the second voltage is applied to at least one hollow cylindrical tube of the reaction chamber to excite a working gas in the annular channel into a plasma through a hollow cathode discharge mechanism,
wherein the annular channel of the reaction chamber induces the alternating magnetic field through a transformer coupled plasma mechanism to generate an induced electric field to excite the plasma to form an electric current with a closed path in the annular channel of the reaction chamber to further dissociate the working gas in order to increase a density of the plasma.