US 12,284,445 B2
Automated application of drift correction to sample studied under electron microscope
Franklin Stampley Walden, II, Raleigh, NC (US); John Damiano, Jr., Holly Springs, NC (US); David P. Nackashi, Raleigh, NC (US); Daniel Stephen Gardiner, Wake Forest, NC (US); Mark Uebel, Morrisville, NC (US); Alan Philip Franks, Durham, NC (US); Benjamin Jacobs, Apex, NC (US); Joshua Brian Friend, Raleigh, NC (US); Katherine Elizabeth Marusak, Cary, NC (US); Nelson L. Marthe, Jr., Cary, NC (US); and Benjamin Bradshaw Larson, Cary, NC (US)
Assigned to Protochips, Inc., Morrisville, NC (US)
Filed by Protochips, Inc., Morrisville, NC (US)
Filed on Feb. 9, 2024, as Appl. No. 18/437,770.
Application 18/437,770 is a continuation of application No. 17/585,222, filed on Jan. 26, 2022, granted, now 11,902,665.
Application 17/585,222 is a continuation in part of application No. 17/545,651, filed on Dec. 8, 2021, granted, now 11,477,388, issued on Oct. 18, 2022.
Application 17/545,651 is a continuation of application No. 17/210,702, filed on Mar. 24, 2021, granted, now 11,399,138, issued on Jul. 26, 2022.
Application 17/210,702 is a continuation of application No. 16/951,297, filed on Nov. 18, 2020, granted, now 10,986,279, issued on Apr. 20, 2021.
Application 16/951,297 is a continuation of application No. PCT/US2020/045937, filed on Aug. 12, 2020.
Claims priority of provisional application 62/888,309, filed on Aug. 16, 2019.
Prior Publication US 2024/0267628 A1, Aug. 8, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/16 (2006.01); G06T 7/215 (2017.01); G06T 7/33 (2017.01); H01J 37/20 (2006.01); H04N 23/695 (2023.01)
CPC H04N 23/695 (2023.01) [G06T 7/215 (2017.01); G06T 7/337 (2017.01); H01J 37/20 (2013.01); G06T 2207/10061 (2013.01); H01J 2237/2594 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for measuring electron dose in a sample with a transmission electron microscope (TEM), the method comprising:
locating a fiducial mark on a TEM holder tip, wherein the TEM holder tip includes a through-hole located at a predetermined distance from the fiducial mark and a current collection area located at a predetermined distance from the fiducial mark;
calibrating the TEM for measuring beam area across a range of possible beam areas to generate a calibration table for beam area for the TEM;
calibrating the TEM for measuring beam current across a range of possible beam currents to generate a calibration table for beam current for the TEM; and
measuring electron dose on the sample during an experiment using the calibrated TEM having a defined configuration, wherein the measured electron dose is determined using the calibration table for beam area and the calibration table for beam current.