US 12,283,944 B2
Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate
Ventsislav Yantchev, Sofia (BG); Viktor Plesski, Gorgier (CH); and Bryant Garcia, Mississauga (CA)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on May 8, 2023, as Appl. No. 18/313,779.
Application 18/313,779 is a continuation of application No. 17/207,326, filed on Mar. 19, 2021, granted, now 11,689,185.
Application 17/207,326 is a continuation of application No. 16/941,458, filed on Jul. 28, 2020, granted, now 11,146,244, issued on Oct. 21, 2021.
Application 16/941,458 is a continuation of application No. 16/782,971, filed on Feb. 5, 2020, granted, now 10,790,802, issued on Sep. 29, 2020.
Application 16/782,971 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/782,971 is a continuation in part of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/689,707 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/904,133, filed on Sep. 23, 2019.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2023/0291388 A1, Sep. 14, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/56 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H10N 30/87 (2023.01)
CPC H03H 9/568 (2013.01) [H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 3/02 (2013.01); H03H 2003/023 (2013.01); H03H 9/02039 (2013.01); H10N 30/877 (2023.02)] 16 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a piezoelectric plate supported by the substrate and having a diaphragm that spans a cavity; and
an interdigital transducer (IDT) on a surface of the piezoelectric plate and having interleaved fingers on the diaphragm,
wherein the piezoelectric plate comprises lithium niobate with Euler angles that are [0°, β, 0°], where β is greater than or equal to 26° and less than or equal to 34°, and
wherein the piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm, the primary shear acoustic mode being a bulk shear mode where acoustic energy propagates along a direction substantially orthogonal to the surface of the piezoelectric plate, which is also transverse to a primary direction of a laterally-excited electric field created between the interleaved fingers of the IDT.