US 12,283,938 B2
Decoupled transversely-excited film bulk acoustic resonators
Sean McHugh, Santa Barbara, CA (US)
Assigned to Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Sep. 28, 2023, as Appl. No. 18/477,307.
Application 18/477,307 is a continuation of application No. 17/547,113, filed on Dec. 9, 2021, granted, now 11,811,386.
Application 17/547,113 is a continuation of application No. 17/408,120, filed on Aug. 20, 2021, granted, now 11,239,816, issued on Feb. 1, 2022.
Claims priority of provisional application 63/137,736, filed on Jan. 15, 2021.
Prior Publication US 2024/0022228 A1, Jan. 18, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 3/04 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/04 (2013.01); H03H 9/02031 (2013.01); H03H 9/02102 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01); H03H 2003/0407 (2013.01); H03H 2003/0442 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bulk acoustic resonator comprising:
a substrate;
a piezoelectric layer attached directly or by one or more intermediate layers to the substrate, the piezoelectric layer including a diaphragm over a cavity of the bulk acoustic resonator;
a decoupling dielectric layer on a surface of the diaphragm and that extends continuously on the surface of the diaphragm, such that an entirety of the surface of the diaphragm is covered by the decoupling layer; and
an interdigital transducer (IDT) with interleaved fingers on the decoupling layer such that the decoupling layer is between the IDT and the diaphragm of the piezoelectric layer.