US 12,283,937 B2
Bulk acoustic wave device with multi-gradient raised frame
Benfeng Zhang, Moriguchi (JP); Jiansong Liu, Irvine, CA (US); Benjamin Paul Abbott, Irvine, CA (US); Kwang Jae Shin, Yongin (KR); and Alexandre Augusto Shirakawa, Cardiff by the Sea, CA (US)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Sep. 10, 2021, as Appl. No. 17/471,604.
Claims priority of provisional application 63/080,530, filed on Sep. 18, 2020.
Prior Publication US 2022/0094323 A1, Mar. 24, 2022
Int. Cl. H03H 9/02 (2006.01); H03F 3/19 (2006.01); H03H 9/00 (2006.01); H03H 9/05 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01); H04B 1/40 (2015.01)
CPC H03H 9/02118 (2013.01) [H03F 3/19 (2013.01); H03H 9/0014 (2013.01); H03H 9/02015 (2013.01); H03H 9/0504 (2013.01); H03H 9/13 (2013.01); H03H 9/132 (2013.01); H03H 9/171 (2013.01); H03H 9/173 (2013.01); H03H 9/54 (2013.01); H03H 9/568 (2013.01); H04B 1/40 (2013.01); H03F 2200/451 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bulk acoustic wave device with a multi-gradient raised frame, the bulk acoustic wave device comprising:
a first electrode;
a second electrode;
a piezoelectric layer positioned between the first electrode and the second electrode; and
a multi-gradient raised frame structure configured to cause lateral energy leakage from a main acoustically active region of the bulk acoustic wave device to be reduced, the multi-gradient raised frame structure being tapered on opposing sides, the multi-gradient raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer extending beyond the first raised frame layer on the opposing sides, the main acoustically active region being free from the first raised frame layer and the second raised frame layer, and the bulk acoustic wave device being configured to generate a bulk acoustic wave.