US 12,283,644 B2
Textured optoelectronic devices and associated methods of manufacture
Lifang Xu, Boise, ID (US); Scott D. Schellhammer, Meridian, ID (US); Shan Ming Mou, Singapore (SG); and Michael J. Bernhardt, Meridian, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Jul. 26, 2023, as Appl. No. 18/359,795.
Application 16/104,857 is a division of application No. 15/149,740, filed on May 9, 2016, granted, now 10,084,114, issued on Sep. 25, 2018.
Application 15/149,740 is a division of application No. 13/190,872, filed on Jul. 26, 2011, granted, now 9,337,366, issued on May 10, 2016.
Application 18/359,795 is a continuation of application No. 17/855,593, filed on Jun. 30, 2022, granted, now 11,742,458.
Application 17/855,593 is a continuation of application No. 16/922,940, filed on Jul. 7, 2020, granted, now 11,411,139, issued on Aug. 9, 2022.
Application 16/922,940 is a continuation of application No. 16/104,857, filed on Aug. 17, 2018, granted, now 10,756,236, issued on Aug. 25, 2020.
Prior Publication US 2023/0387353 A1, Nov. 30, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 33/38 (2010.01); H01L 31/0216 (2014.01); H01L 31/0236 (2006.01); H01L 33/22 (2010.01); H01L 33/42 (2010.01); H01L 33/58 (2010.01)
CPC H01L 33/38 (2013.01) [H01L 31/02168 (2013.01); H01L 31/0236 (2013.01); H01L 33/22 (2013.01); H01L 33/42 (2013.01); H01L 33/58 (2013.01); H01L 2933/0091 (2013.01); Y02E 10/50 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An optoelectronic device, comprising:
a base layer configured for optoelectronic functions;
a Titanium-based material over the base layer; and
a top layer over and directly contacting the Titanium-based material, wherein:
the top layer includes a surface having a plurality of protuberances,
the plurality of protuberances includes irregularly patterned pillars, and
the top layer is configured to react with the Titanium-based material and cause the irregular pillars to form at least partially based on the direct contact.