US 12,283,529 B2
Method of repairing through-electrodes, repair device performing the same and semiconductor device including the same
Sungho Kang, Seoul (KR); and Youngkwang Lee, Ansan-si (KR)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Apr. 27, 2022, as Appl. No. 17/660,920.
Claims priority of application No. 10-2021-0119552 (KR), filed on Sep. 8, 2021.
Prior Publication US 2023/0072965 A1, Mar. 9, 2023
Int. Cl. H01L 21/66 (2006.01); H01L 23/48 (2006.01); H03K 17/00 (2006.01)
CPC H01L 22/22 (2013.01) [H01L 22/14 (2013.01); H01L 22/32 (2013.01); H01L 23/481 (2013.01); H03K 17/005 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of repairing through-electrodes, comprising:
grouping a plurality of through-electrodes into a plurality of through-electrode groups arranged in a circular structure, the plurality of through-electrodes being configured for signal transmissions, each through-electrode group including two or more through-electrodes;
grouping a plurality of redundant through-electrodes into a plurality of redundant through-electrode groups, the plurality of redundant through-electrodes being configured to replace the plurality of through-electrodes in response to the plurality of through-electrodes being defective, each redundant through-electrode group including at least one redundant through-electrode and corresponding to at least one through-electrode group; and
searching repair paths for the plurality of through-electrodes, and
wherein searching the repair paths includes:
in response to a Y-th through-electrode included in an X-th through-electrode group being a defective through-electrode or in response to receiving a first signal from an (X−1)-th through-electrode group, determining whether a y-th redundant through-electrode included in an x-th redundant through-electrode group corresponding to the X-th through-electrode group is available for performing signal transmission thereto, where X is a natural number greater than or equal to one and less than or equal to M, where Y is a natural number greater than or equal to one and less than or equal to N, where x is a natural number greater than or equal to one and less than or equal to m, where y is a natural number greater than or equal to one and less than or equal to n;
in response to the y-th redundant through-electrode being available for performing signal transmission thereto, transmitting a second signal input to the Y-th through-electrode to the y-th redundant through-electrode; and
in response to the y-th redundant through-electrode being unavailable for performing signal transmission thereto, transmitting the second signal input to the Y-th through-electrode to an (X+1)-th through-electrode group.