| CPC H01L 21/6838 (2013.01) [H01J 37/32724 (2013.01); H01J 37/32816 (2013.01); H01L 21/6833 (2013.01); H01J 2237/182 (2013.01); H01J 2237/2007 (2013.01)] | 11 Claims |
|
1. A ceramic susceptor comprising:
an insulation plate on which an electrode is disposed;
a shaft having one end connected to the insulation plate;
a mount connected to a lower portion of the shaft;
a separator coupled to the other end of the shaft and sealing an inner space of the shaft; and
a power supply rod connected to the electrode and extending through the inner space of the shaft, the separator and the mount,
wherein the insulation plate comprises a first through-passage formed through an upper surface and a lower surface thereof and is configured to communicate the inner space of the shaft therewith,
wherein the mount includes a second through-passage that communicates the inner space of the shaft with an outside, and the second through-passage is a through-hole formed to penetrate the mount, and
wherein a vacuum chuck function and/or a purge function are performable using the first through-passage, a through-hole of the separator, the second through-passage and the inner space of the shaft where the power supply rod is received.
|