US 12,283,505 B2
Substrate retaining assembly and door device
Ming-Chien Chiu, New Taipei (TW); Chia-Ho Chuang, New Taipei (TW); Kuo-Hua Lee, New Taipei (TW); Jyun-Ming Lyu, New Taipei (TW); Tzu Ang Chiang, I-lan (TW); Yi-Feng Huang, Kaohsiung (TW); and Tsung-Yi Lin, Tainan (TW)
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW); and TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW); and TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on May 23, 2023, as Appl. No. 18/322,263.
Claims priority of provisional application 63/348,004, filed on Jun. 1, 2022.
Claims priority of application No. 112115638 (TW), filed on Apr. 26, 2023.
Prior Publication US 2023/0395412 A1, Dec. 7, 2023
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67373 (2013.01) [H01L 21/67386 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate retaining assembly, comprising:
a retaining body; and
a plurality of retaining members disposed on the retaining body and arranged at intervals, each of the retaining members comprising:
two elastic arms; and
a clamping structure comprising:
a clamping body connected between the two elastic arms;
a clamping groove located on the clamping body and communicated with adjacent ends of the elastic arms; and
at least one relief portion communicated to the clamping groove.
 
10. A door device, comprising:
a door body; and
a substrate retaining assembly disposed on a side of the door body and comprising:
a retaining body; and
a plurality of retaining members disposed on the retaining body and arranged at intervals, each of the retaining members comprising:
two elastic arms; and
a clamping structure comprising:
a clamping body connected between the two elastic arms;
a clamping groove located on the clamping body and communicated with adjacent ends of the elastic arms; and
at least one relief portion communicated to the clamping groove.