US 12,283,502 B2
Substrate transfer device and substrate transfer method
Young Wook Kim, Seoul (KR); Sang Min Kim, Hwaseong-si (KR); Ji Hun Kim, Uiwang-si (KR); Gi-Nam Park, Incheon (KR); Chul-Jun Park, Seoul (KR); Yong-Jun Ahn, Suwon-si (KR); Youn Gon Oh, Hwaseong-si (KR); Byung Kook Yoo, Hwaseong-si (KR); Hyun Woo Lee, Hwaseong-si (KR); and Jeong Hun Lim, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Dec. 6, 2021, as Appl. No. 17/543,025.
Claims priority of application No. 10-2021-0050233 (KR), filed on Apr. 19, 2021.
Prior Publication US 2022/0336241 A1, Oct. 20, 2022
Int. Cl. G06F 7/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67265 (2013.01) [H01L 21/67742 (2013.01); H01L 21/67745 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate transfer device comprising:
a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored;
an upper interface unit configured to move the transfer unit, and a lower interface unit configured to receive the carrier from the transfer unit; and
a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.
 
16. A substrate transfer method, comprising:
providing a substrate transfer device comprising:
a first transfer unit configured to transfer a carrier in which substrates are stored,
an upper interface unit including an upper track configured to move the first transfer unit in a first direction and a movement assisting mechanism configured to assist movement of the first transfer unit,
a lower interface unit including a lower track disposed below the upper track and a shuttle disposed on the lower track, the shuttle being configured to transport the carrier from the first transfer unit to target equipment, and
a controller that integrally controls the upper interface unit and the lower interface unit;
controlling, by the controller, the movement assisting mechanism and the shuttle to be at the same position in the first direction in a region in which the upper interface unit and the lower interface unit overlap; and
moving the first transfer unit in the first direction in an interface region corresponding to the overlapped region, and at the same time, loading the carrier on the shuttle along a second direction perpendicular to the first direction.