US 12,283,496 B2
Multi-zone heater
Keisuke Takashima, Toyohashi (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Jul. 17, 2023, as Appl. No. 18/353,221.
Application 18/353,221 is a continuation of application No. PCT/JP2023/004621, filed on Feb. 10, 2023.
Prior Publication US 2024/0274446 A1, Aug. 15, 2024
Int. Cl. H01L 21/67 (2006.01); H01L 21/687 (2006.01); H05B 3/28 (2006.01)
CPC H01L 21/67103 (2013.01) [H01L 21/68742 (2013.01); H05B 3/283 (2013.01); H05B 2203/005 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A multi-zone heater comprising:
a disc-shaped ceramic substrate having one main surface to be a wafer mounting surface, the multi-zone heater being capable of heating a wafer mounted on the one main surface;
a plurality of lift pin holes which are provided in the ceramic substrate and into which lift pins to lift the wafer are insertable;
an inner zone heater embedded in an inner zone of the ceramic substrate and formed of concentric arcs;
an outer zone heater embedded in an outer zone outside the inner zone of the ceramic substrate and formed of concentric ares;
a first feed terminal and a second feed terminal which are arranged in a central portion of the ceramic substrate and to which opposite ends of the inner zone heater are connected;
a first lead and a second lead to which opposite ends of the outer zone heater are connected; and
a third feed terminal and a fourth feed terminal which are arranged in the central portion of the ceramic substrate and to which the first lead and the second lead are respectively connected, wherein
the plurality of lift pin holes, the inner zone heater, and the outer zone heater are arranged to be symmetric with respect to a common axis of symmetry that is along a radial direction of the ceramic substrate, and
the first lead and the second lead are arranged along the axis of symmetry to be symmetric to each other and are also symmetric with respect to the plurality of lift pin holes, and
wherein the inner zone heater includes curved portions curved radially outward toward the plurality of lift pin holes,
wherein the outer zone heater includes curved portions curved radially away from the plurality of lift pin holes, and
wherein the plurality of lift pin holes are arranged between the inner zone heater and the outer zone heater.