US 12,283,470 B2
Multifocal magnetron design for physical vapor deposition processing on a single cathode
Samuel D. Harkness, IV, Albany, NY (US); and Quang N. Tran, San Jose, CA (US)
Assigned to INTEVAC, INC., Santa Clara, CA (US)
Filed by Intevac, Inc., Santa Clara, CA (US)
Filed on Aug. 24, 2022, as Appl. No. 17/822,107.
Application 17/822,107 is a division of application No. 16/210,488, filed on Dec. 5, 2018, granted, now 11,456,162.
Claims priority of provisional application 62/598,383, filed on Dec. 13, 2017.
Prior Publication US 2022/0406582 A1, Dec. 22, 2022
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01)
CPC H01J 37/345 (2013.01) [C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/355 (2013.01); H01J 37/3405 (2013.01); H01J 37/3414 (2013.01); H01J 37/3435 (2013.01); H01J 37/3452 (2013.01); H01J 37/3461 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A sputtering magnetron, comprising:
a heat sink;
a target affixed onto a first side of the heat sink; and,
a magnet arrangement comprising:
a magnetically permeable keeper plate assembly positioned at a second side of the heat sink, opposite the first side, the magnetically permeable keeper plate assembly having an outer perimeter and a tapered edge protruding perpendicularly outwards from the outer perimeter in a direction towards both the heat sink and target;
a first magnet array mounted onto a first surface of the magnetically permeable keeper plate assembly and on a centerline of the magnetically permeable keeper plate assembly;
a second magnet array mounted onto a second surface of the magnetically permeable keeper plate assembly, opposite the first surface, and on the outer perimeter of the magnetically permeable keeper plate assembly; and
a third magnet array mounted onto the second surface of the magnetically permeable keeper plate assembly and positioned collinearly to the centerline of the magnetically permeable keeper plate assembly.