US 12,283,469 B2
High-frequency grounding device and vacuum valve having high-frequency grounding device
Arthur Büchel, Ruggell (LI); and Adrian Weitnauer, Näfels (CH)
Assigned to VAT HOLDING AG, Haag (CH)
Filed by VAT Holding AG, Haag (CH)
Filed on May 16, 2022, as Appl. No. 17/744,866.
Claims priority of application No. 10 2021 002 577.6 (DE), filed on May 18, 2021.
Prior Publication US 2022/0375732 A1, Nov. 24, 2022
Int. Cl. H01J 37/32 (2006.01); F16K 51/02 (2006.01); H05F 3/02 (2006.01)
CPC H01J 37/32816 (2013.01) [F16K 51/02 (2013.01); H01J 37/32082 (2013.01); H05F 3/02 (2013.01); H01J 2237/186 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A high-frequency grounding device for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end and a second end and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve and to be connected at the second end to a component, of the vacuum chamber system, wherein
the high-frequency grounding device has a correction impedance, wherein
the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and
the correction impedance has a first element for shifting a resonance frequency of the resonant circuit.
 
14. A vacuum valve, for closing and opening a valve opening of a vacuum chamber system, having
a valve seat, which has a valve opening defining an opening axis and a first sealing surface circumferentially around the valve opening,
a valve closure comprising a valve plate, for regulating the volume or mass flow and/or for essentially gas-tight closing of the valve opening using a second sealing surface corresponding to the first sealing surface, and
a grounding device having a grounding band for grounding occurring electrical charges, wherein
the grounding device is designed as a high-frequency grounding device having a correction impedance, wherein
the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and
the correction impedance comprises at least one of the following:
a first element for shifting a resonance frequency of the resonant circuit, a second element for decreasing a quality of the resonant circuit, or combinations thereof.