US 12,283,464 B2
Plasma reaction device
Dai Kyu Choi, Seoul (KR); and Eun Seok Lim, Suwon-si (KR)
Assigned to NEW POWER PLASMA CO., LTD., Suwon-si (KR)
Appl. No. 18/010,539
Filed by NEW POWER PLASMA CO., LTD., Suwon-si (KR)
PCT Filed Jul. 29, 2020, PCT No. PCT/KR2020/010003
§ 371(c)(1), (2) Date Dec. 15, 2022,
PCT Pub. No. WO2021/256606, PCT Pub. Date Dec. 23, 2021.
Claims priority of application No. 10-2020-0073079 (KR), filed on Jun. 16, 2020.
Prior Publication US 2023/0245857 A1, Aug. 3, 2023
Int. Cl. H01J 37/00 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32357 (2013.01) [H01J 37/32 (2013.01); H01J 37/32522 (2013.01); H01J 37/32669 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A plasma reaction device comprising:
a reactor part configured to excite an input gas to be in a plasma state;
a resonant network circuit part electrically connected to the reactor part and including at least one inductor and at least one condenser; and
a power supply part configured to apply power to the resonant network circuit part, wherein the inductor comprises:
a first coil formed between a first terminal and a second terminal and having at least a portion spirally wound to form a first cylindrical reception space inside thereof; and
a second coil formed between the first terminal and the second terminal spirally wound in the first cylindrical reception space,
wherein the reactor part comprises:
a reactor body having a gas inlet formed on one side thereof and a plasma outlet formed on the other side thereof and having an annular loop space formed therein; and
a magnetic core formed in a shape surrounding at least a portion of the reactor body and having a primary winding to generate a transformer coupled plasma by exciting the gas in the annular loop space.