US 12,283,458 B2
Charged particle beam device
Mai Yoshihara, Tokyo (JP); Hirotsugu Kajiyama, Tokyo (JP); and Hiroyuki Chiba, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/910,875
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Mar. 18, 2020, PCT No. PCT/JP2020/012094
§ 371(c)(1), (2) Date Sep. 12, 2022,
PCT Pub. No. WO2021/186637, PCT Pub. Date Sep. 23, 2021.
Prior Publication US 2023/0105549 A1, Apr. 6, 2023
Int. Cl. H01J 37/21 (2006.01); H01J 37/06 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/21 (2013.01) [H01J 37/06 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/216 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
an electron gun capable of emitting an electron beam;
an objective lens for focusing the electron beam;
a stage for installing a sample;
a detector capable of detecting secondary electrons or reflection electrons emitted from the sample as a signal when the sample is installed on the stage and the sample is irradiated with the electron beam at the time of analysis of the sample;
a control unit electrically connected to the electron gun, the objective lens, the stage, and the detector, and having an image processing control circuit capable of converting the signal detected by the detector into a photographed image;
a photographing function for automatically continuously photographing each of a plurality of photographing visual fields in the sample, which are analysis targets, as the photographed image at the time of analysis of the sample; and
an autofocus function for automatically focusing each of the plurality of photographing visual fields and automatically calculating focus values thereof at the time of analysis of the sample, wherein
each of the plurality of photographing visual fields is focused in a first focus value calculation visual field adjacent to the photographing visual field designated as a photographing target among the plurality of photographing visual fields, and
the focus value calculated in the first focus value calculation visual field is used for calculating the focus values of each of the plurality of photographing visual fields.