US 12,283,456 B2
Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device
Andreas Schmaunz, Oberkochen (DE); Gero Walter, Westhausen (DE); Bernd Stenke, Illertissen (DE); and Gerald Schmid, Blaustein (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Dec. 12, 2022, as Appl. No. 18/079,074.
Claims priority of application No. 102021132834.9 (DE), filed on Dec. 13, 2021.
Prior Publication US 2023/0282442 A1, Sep. 7, 2023
Int. Cl. H01J 37/16 (2006.01); H01J 37/10 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/16 (2013.01) [H01J 37/10 (2013.01); H01J 2237/006 (2013.01); H01J 2237/0492 (2013.01); H01J 2237/166 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gas reservoir for receiving a precursor, comprising:
a basic body having a first receiving unit and a second receiving unit and having a first basic body opening that is connectable to a pump unit and a second basic body opening that is connectable to a line device to feed a gaseous state of the precursor to an object;
a gas-receiving unit, arranged in the first receiving unit of the basic body and having a gas outlet opening and a movable closure unit that opens or closes the gas outlet opening; and
a sliding unit, arranged movably in the second receiving unit of the basic body and having a sliding-unit line device that moves the movable closure unit and having a first opening and a second opening, wherein in a first position of the sliding unit, the first opening of the sliding-unit line device is fluidically connected to the first basic body opening and the second opening of the sliding-unit line device is fluidically connected to the second basic body opening and wherein, in a second position of the sliding unit, the first opening is arranged at an inner wall of the second receiving unit and the second opening is arranged at the movable closure unit.