| CPC H01J 37/147 (2013.01) [H01J 37/141 (2013.01); H01J 37/26 (2013.01)] | 25 Claims |

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1. A monochromator device comprising:
a first radiofrequency cavity positioned to receive an output beam from an electron source;
a second radiofrequency cavity positioned to receive the output beam from the first radiofrequency cavity, wherein the first radiofrequency cavity and the second radiofrequency cavity are configured to, in combination, correct one or more energy deviations in time and space of the output beam.
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