US 12,283,453 B2
Creating multiple electron beams with a photocathode film
Xinrong Jiang, Palo Alto, CA (US); Youfei Jiang, Milpitas, CA (US); Michael Steigerwald, Milpitas, CA (US); and Ralph Nyffenegger, Palo Alto, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Jun. 1, 2022, as Appl. No. 17/830,244.
Prior Publication US 2023/0395349 A1, Dec. 7, 2023
Int. Cl. H01J 37/073 (2006.01); H01J 37/12 (2006.01); H01J 37/14 (2006.01); H01J 37/147 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/073 (2013.01) [H01J 37/12 (2013.01); H01J 37/14 (2013.01); H01J 37/1472 (2013.01); H01J 37/22 (2013.01); H01J 37/28 (2013.01); H01J 2237/0492 (2013.01); H01J 2237/06333 (2013.01); H01J 2237/103 (2013.01); H01J 2237/2448 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An electron-beam device, comprising:
a laser;
a photocathode film having a front side and a back side, to emit a plurality of electron beamlets when illuminated from the back side using the laser; and
electrodes to extract the plurality of electron beamlets from the front side of the photocathode film and to control shapes of the plurality of electron beamlets, the electrodes comprising:
a Wehnelt electrode having a first plurality of openings for the plurality of electron beamlets,
an extractor electrode having a second plurality of openings for the plurality of electron beamlets, and
an anode having a third plurality of openings for the plurality of electron beamlets, wherein:
the Wehnelt electrode is disposed between the front side of the photocathode film and the extractor electrode; and
the extractor electrode is disposed between the Wehnelt electrode and the anode.