US 12,283,452 B2
Charged particle beam apparatus
Hiroshi Morita, Tokyo (JP); Takashi Kubo, Tokyo (JP); Minoru Sakamaki, Tokyo (JP); Shuhei Ishikawa, Tokyo (JP); and Shunichi Watanabe, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/285,457
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Apr. 15, 2021, PCT No. PCT/JP2021/015638
§ 371(c)(1), (2) Date Oct. 3, 2023,
PCT Pub. No. WO2022/219790, PCT Pub. Date Oct. 20, 2022.
Prior Publication US 2025/0079112 A1, Mar. 6, 2025
Int. Cl. H01J 37/07 (2006.01); H01J 37/09 (2006.01); H01J 37/16 (2006.01); H01J 37/24 (2006.01); H01J 37/295 (2006.01)
CPC H01J 37/07 (2013.01) [H01J 37/09 (2013.01); H01J 37/16 (2013.01); H01J 37/241 (2013.01); H01J 37/2955 (2013.01); H01J 2237/0473 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A charged particle beam apparatus that emits a charged particle beam from a charged particle beam emission device onto a sample, detects a charged particle generated from the sample, and creates a sample image or processes the sample, the charged particle beam emission device comprising:
a charged particle source and a shield that are arranged in an interior of a metal housing that is filled with an insulating gas; and
an acceleration electrode arranged below the charged particle source, wherein
power is supplied to the acceleration electrode via the shield.