US 12,283,451 B2
Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
Vince Burkhart, Cupertino, CA (US); Christopher Ramsayer, Tualatin, OR (US); and Mohan Thilagaraj, Tualatin, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Nov. 29, 2021, as Appl. No. 17/537,388.
Application 17/537,388 is a continuation of application No. 16/520,602, filed on Jul. 24, 2019, granted, now 11,189,452.
Application 16/520,602 is a continuation of application No. 14/965,030, filed on Dec. 10, 2015, granted, now 10,373,794, issued on Aug. 6, 2019.
Claims priority of provisional application 62/247,979, filed on Oct. 29, 2015.
Prior Publication US 2022/0084776 A1, Mar. 17, 2022
Int. Cl. H01J 37/04 (2006.01); H01J 37/244 (2006.01); H01J 37/32 (2006.01); H05B 1/02 (2006.01)
CPC H01J 37/04 (2013.01) [H01J 37/244 (2013.01); H01J 37/32522 (2013.01); H01J 37/32935 (2013.01); H05B 1/0233 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A circuit comprising:
a first filter assembly configured to receive a first signal from a first conductor of a showerhead disposed in a plasma chamber and block a first frequency range of the first signal to provide a second signal;
a second filter assembly configured to receive the second signal and block frequencies of the second signal in a second frequency range to provide a third signal;
an isolation device configured to receive the third signal and block direct current voltages of the third signal to output a fourth signal; and
a controller configured to control supply of radio frequency current to the showerhead based on the fourth signal.